Inverted list

Sample document collection

Id Contents
1. The only way not to think about money is to have a great deal of it.
2. When I was young I thought that money was the most important thing in life; now that I am old I know that it is.
3. A man is usually more careful of his money than he is of his principles.
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The indexes are:
List 1 Just the document lists. The format is (d1, d2, . . .), where dn is the document id number.
List 2 Document lists with word frequencies. The format is (d1:f1, d2:f2, . . .), where dn is the document id number and fn is the word frequency.
List 3 Document lists and word positions with word granularity. The format is (d1:(w1, w2, . . .), (d2:(w1, w2, . . .), . . .), where dn is the document id number and wn are the word positions.
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MOCVD薄膜之沉積

薄膜之沉積為一表面反應，其沉積速率主要與化學反應動力學有關，相關參數為基板溫度、腔體之操作壓力及反應氣體之成分等
基板溫度屬高溫區，表面化學反應速率高，反應成分之質量傳輸率限制磊晶之生長率。此時，薄膜磊晶生長率與厚度之均勻度則受反應器內反應物之流場性質及輸送現象(transport phenomena)，包含

• 氣流、速度、溫度分布、熱傳及質傳等因素之影響
• 氣體反應生成物之流速、進氣方式、基板
• 與反應室內之溫度、壓力及其幾何形狀等參數

對副產品之輸送現象也有極其重要之決定性

熱流耦合效應

• 反應器內因氣體之間溫差而有溫度梯度之存在，流場中之熱效應可藉由溫度特徵△T 表示之
• 熱浮力(thermal buoyancy effect)為反應器中最重要之熱效應，該熱效應之強弱可由一無因次之Grashof數表示之。

熱質傳耦合—擴散熱效應與熱擴散效應

• 在MOCVD 反應器中，由於溫度梯度與反應氣體各成分之濃度梯度共存，而有所謂熱質傳耦合現象。

以上摘錄至：郭峰鳴(93)，MOCVD 反應器之氮化鎵薄膜成長參數探討.